Publicaciones en colaboración con investigadores/as de Interuniversity Microelectronics Centre (3)

2010

  1. LENS (lithography enhancement toward nano scale): A European project to support double exposure and double patterning technology development

    Proceedings of SPIE - The International Society for Optical Engineering

2006

  1. Comprehensive approach to MuGFET metrology

    Proceedings of SPIE - The International Society for Optical Engineering

2005

  1. CD SEM calibration to TEM for accurate metrology of FINs in MuGFET devices

    IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings