Evgenii
Modin
Specialist
Dagestan State University
Makhachkala, RusiaDagestan State University-ko ikertzaileekin lankidetzan egindako argitalpenak (3)
2021
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Radical-triggered cross-linking for molecular layer deposition of SiAlCOH hybrid thin films
Chemical Communications, Vol. 57, Núm. 17, pp. 2160-2163
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Ultrathin Hybrid SiAlCOH Dielectric Films through Ring-Opening Molecular Layer Deposition of Cyclic Tetrasiloxane
Chemistry of Materials, Vol. 33, Núm. 3, pp. 1022-1030
2020
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Molecular layer deposition of hybrid siloxane thin films by ring opening of cyclic trisiloxane (V3D3) and azasilane
Chemical Communications, Vol. 56, Núm. 62, pp. 8778-8781