Publikationen in Zusammenarbeit mit Forschern von Dagestan State University (3)

2021

  1. Radical-triggered cross-linking for molecular layer deposition of SiAlCOH hybrid thin films

    Chemical Communications, Vol. 57, Núm. 17, pp. 2160-2163

  2. Ultrathin Hybrid SiAlCOH Dielectric Films through Ring-Opening Molecular Layer Deposition of Cyclic Tetrasiloxane

    Chemistry of Materials, Vol. 33, Núm. 3, pp. 1022-1030

2020

  1. Molecular layer deposition of hybrid siloxane thin films by ring opening of cyclic trisiloxane (V3D3) and azasilane

    Chemical Communications, Vol. 56, Núm. 62, pp. 8778-8781