Process optimization for the effective reduction of threading dislocations in MOVPE grown GaN using in situ deposited SiNx masks

1. Hertkorn, J.
2. Lipski, F.
3. Brückner, P.
4. Wunderer, T.
5. Thapa, S.B.
6. Scholz, F.
7. Chuvilin, A.
8. Kaiser, U.
9. Beer, M.
10. Zweck, J.