Fabrication of PZT actuated cantilevers on silicon-on-insulator wafers for a RF microswitch

  1. Jiang, H.W.
  2. Kirby, P.
  3. Zhang, Q.
Aktak:
Proceedings of SPIE - The International Society for Optical Engineering

ISSN: 0277-786X

Argitalpen urtea: 2003

Alea: 4979

Orrialdeak: 165-173

Mota: Biltzar ekarpena

DOI: 10.1117/12.478245 GOOGLE SCHOLAR
Datuen iturria: Scopus