Fabrication of PZT actuated cantilevers on silicon-on-insulator wafers for a RF microswitch
- Jiang, H.W.
- Kirby, P.
- Zhang, Q.
Proceedings:
Proceedings of SPIE - The International Society for Optical Engineering
ISSN: 0277-786X
Year of publication: 2003
Volume: 4979
Pages: 165-173
Type: Conference paper