Mato
Knez
Group Leader
University of Groningen
Groninga, HolandaPublicaciones en colaboración con investigadores/as de University of Groningen (1)
2021
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Amorphous AlN films grown by ALD from trimethylaluminum and monomethylhydrazine
Dalton Transactions, Vol. 50, Núm. 42, pp. 15062-15070