Mato
Knez
Group Leader
Fraunhofer Institute for Silicon Technology
Itzehoe, AlemaniaPublicaciones en colaboración con investigadores/as de Fraunhofer Institute for Silicon Technology (1)
2017
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A Novel Fabrication Technique for MEMS Based on Agglomeration of Powder by ALD
Journal of Microelectromechanical Systems, Vol. 26, Núm. 5, pp. 1093-1098