Andrey
Chuvilin
Group Leader
![Foto de Andrey](/img/nophoto.png)
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Dagestan State University
Makhachkala, RusiaPublicaciones en colaboración con investigadores/as de Dagestan State University (1)
2021
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Ultrathin Hybrid SiAlCOH Dielectric Films through Ring-Opening Molecular Layer Deposition of Cyclic Tetrasiloxane
Chemistry of Materials, Vol. 33, Núm. 3, pp. 1022-1030