Qi
Zhang
Ikerbasque Research Professor
IK4-TEKNIKER
Eibar, EspañaPublicaciones en colaboración con investigadores/as de IK4-TEKNIKER (3)
2024
2007
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New materials for micro-scale sensors and actuators. An engineering review
Materials Science and Engineering R: Reports, Vol. 56, Núm. 1-6, pp. 1-129
2003
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Soft lithographic patterning of oxide thin films
Proceedings of SPIE - The International Society for Optical Engineering