A fully integrated thermo-pneumatic tunable microlens
- Zhang, W.
- Aljasem, K.
- Zappe, H.
- Seifert, A.
Proceedings:
2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010
ISBN: 9781424489251
Year of publication: 2010
Pages: 87-88
Type: Conference paper