An all-nickel magnetostatic MEMS scanner
- Weber, N.
- Zappe, H.
- Seifert, A.
ISSN: 0960-1317, 1361-6439
Année de publication: 2012
Volumen: 22
Número: 12
Type: Article
Revue:
Journal of Micromechanics and Microengineering
