An all-nickel magnetostatic MEMS scanner

  1. Weber, N.
  2. Zappe, H.
  3. Seifert, A.
Journal:
Journal of Micromechanics and Microengineering

ISSN: 0960-1317 1361-6439

Year of publication: 2012

Volume: 22

Issue: 12

Type: Article

DOI: 10.1088/0960-1317/22/12/125008 GOOGLE SCHOLAR

Sustainable development goals