An all-nickel magnetostatic MEMS scanner
- Weber, N.
- Zappe, H.
- Seifert, A.
ISSN: 0960-1317, 1361-6439
Year of publication: 2012
Volume: 22
Issue: 12
Type: Article
ISSN: 0960-1317, 1361-6439
Year of publication: 2012
Volume: 22
Issue: 12
Type: Article