New liquid precursors for the metal-organic CVD of gold films

  1. Parkhomenko, R.G.
  2. Turgambaeva, A.E.
  3. Morozova, N.B.
  4. Trubin, S.V.
  5. Krisyuk, V.V.
  6. Igumenov, I.K.
Journal:
Chemical Vapor Deposition

ISSN: 0948-1907,  1521-3862

Year of publication: 2013

Volume: 19

Issue: 1-3

Pages: 38-44

Type: Article

DOI: 10.1002/CVDE.201207022 GOOGLE SCHOLAR
Data source: Scopus