Chemical infiltration during atomic layer deposition: metalation of porphyrins as model substrates
- Zhang, L.
- Patil, A.J.
- Li, L.
- Schierhorn, A.
- Mann, S.
- Gösele, U.
- Knez, M.
ISSN: 1433-7851
Year of publication: 2009
Volume: 48
Issue: 27
Pages: 4982-4985
Type: Article