Progress and future directions for atomic layer deposition and ALD-based chemistry

  1. Parsons, G.N.
  2. George, S.M.
  3. Knez, M.
Journal:
MRS Bulletin

ISSN: 0883-7694

Year of publication: 2011

Volume: 36

Issue: 11

Pages: 865-871

Type: Article

DOI: 10.1557/MRS.2011.238 GOOGLE SCHOLAR lock_openOpen access editor

Sustainable development goals

Data source: Scopus