Atomic layer deposition of metal fluorides through oxide chemistry

  1. Putkonen, M.
  2. Szeghalmi, A.
  3. Pippel, E.
  4. Knez, M.
Journal:
Journal of Materials Chemistry

ISSN: 1364-5501,  0959-9428

Year of publication: 2011

Volume: 21

Issue: 38

Pages: 14461-14465

Type: Article

DOI: 10.1039/C1JM11825K GOOGLE SCHOLAR

Sustainable development goals

Data source: Scopus