Atomic layer deposition of iridium thin films and their application in gold electrodeposition

  1. Szeghalmi, A.
  2. Arnold, M.
  3. Berger, A.
  4. Schammelt, N.
  5. Fuechsel, K.
  6. Knez, M.
  7. Kley, E.B.
  8. Zahn, D.R.T.
  9. Tuennermann, A.
Aktak:
Proceedings of SPIE - The International Society for Optical Engineering

ISSN: 0277-786X

ISBN: 9780819487940

Argitalpen urtea: 2011

Alea: 8168

Mota: Biltzar ekarpena

DOI: 10.1117/12.896818 GOOGLE SCHOLAR

Garapen Iraunkorreko Helburuak

Datuen iturria: Scopus