Atomic layer deposition of iridium thin films and their application in gold electrodeposition

  1. Szeghalmi, A.
  2. Arnold, M.
  3. Berger, A.
  4. Schammelt, N.
  5. Fuechsel, K.
  6. Knez, M.
  7. Kley, E.B.
  8. Zahn, D.R.T.
  9. Tuennermann, A.
Proceedings:
Proceedings of SPIE - The International Society for Optical Engineering

ISSN: 0277-786X

ISBN: 9780819487940

Year of publication: 2011

Volume: 8168

Type: Conference paper

DOI: 10.1117/12.896818 GOOGLE SCHOLAR

Sustainable development goals

Data source: Scopus