Diffusion phenomena in atomic layer deposition

  1. Knez, M.
Journal:
Semiconductor Science and Technology

ISSN: 0268-1242,  1361-6641

Year of publication: 2012

Volume: 27

Issue: 7

Type: Article

DOI: 10.1088/0268-1242/27/7/074001 GOOGLE SCHOLAR
Data source: Scopus