A Novel Fabrication Technique for MEMS Based on Agglomeration of Powder by ALD

  1. Lisec, T.
  2. Reimer, T.
  3. Knez, M.
  4. Chemnitz, S.
  5. Schulz-Walsemann, A.V.
  6. Kulkarni, A.
Journal:
Journal of Microelectromechanical Systems

ISSN: 1057-7157

Year of publication: 2017

Volume: 26

Issue: 5

Pages: 1093-1098

Type: Article

DOI: 10.1109/JMEMS.2017.2708814 GOOGLE SCHOLAR

Sustainable development goals

Data source: Scopus