Development of effective technique for irradiating samples of thin films using the focused ion beam
- Kotvitckii, A.
- Dubitents, A.
- Ermakov, K.
- Modin, E.
- Pustovalov, E.
- Plotnikov, V.
ISSN: 1662-8985, 1022-6680
ISBN: 9783038352549
Year of publication: 2014
Volume: 1025-1026
Pages: 765-769
Type: Conference paper