Molecular layer deposition of hybrid siloxane thin films by ring opening of cyclic trisiloxane (V3D3) and azasilane

1. Ashurbekova, K.
2. Ashurbekova, K.
3. Saric, I.
4. Modin, E.
5. Petravić, M.
6. Abdulagatov, I.
7. Abdulagatov, A.
8. Knez, M.