Molecular layer deposition of hybrid siloxane thin films by ring opening of cyclic trisiloxane (V3D3) and azasilane
- Ashurbekova, K.
- Ashurbekova, K.
- Saric, I.
- Modin, E.
- Petravić, M.
- Abdulagatov, I.
- Abdulagatov, A.
- Knez, M.
ISSN: 1364-548X, 1359-7345
Year of publication: 2020
Volume: 56
Issue: 62
Pages: 8778-8781
Type: Article