Radical-triggered cross-linking for molecular layer deposition of SiAlCOH hybrid thin films

1. Ashurbekova, K.
2. Ashurbekova, K.
3. Saric, I.
4. Modin, E.
5. Petravic, M.
6. Abdulagatov, I.
7. Abdulagatov, A.
8. Knez, M.