Radical-triggered cross-linking for molecular layer deposition of SiAlCOH hybrid thin films

  1. Ashurbekova, K.
  2. Ashurbekova, K.
  3. Saric, I.
  4. Modin, E.
  5. Petravic, M.
  6. Abdulagatov, I.
  7. Abdulagatov, A.
  8. Knez, M.
Journal:
Chemical Communications

ISSN: 1364-548X,  1359-7345

Year of publication: 2021

Volume: 57

Issue: 17

Pages: 2160-2163

Type: Article

DOI: 10.1039/D0CC07858A GOOGLE SCHOLAR
Data source: Scopus