Ultrathin Hybrid SiAlCOH Dielectric Films through Ring-Opening Molecular Layer Deposition of Cyclic Tetrasiloxane

  1. Ashurbekova, K.
  2. Ashurbekova, K.
  3. Saric, I.
  4. Gobbi, M.
  5. Modin, E.
  6. Chuvilin, A.
  7. Petravic, M.
  8. Abdulagatov, I.
  9. Knez, M.
Journal:
Chemistry of Materials

ISSN: 1520-5002,  0897-4756

Year of publication: 2021

Volume: 33

Issue: 3

Pages: 1022-1030

Type: Article

DOI: 10.1021/ACS.CHEMMATER.0C04408 GOOGLE SCHOLAR
Data source: Scopus