Investigations of the adhesion of maleic anhydride/cyclic olefin alternating copolymers to silicon substrates: Improved materials for 193 NM lithography

  1. Pasquale, A.J.
  2. Long, T.E.
  3. Truong, H.
  4. Allen, R.D.
Revue:
Journal of Adhesion

ISSN: 0021-8464

Année de publication: 2002

Volumen: 78

Número: 1

Pages: 1-13

Type: Article

DOI: 10.1080/00218460210378 GOOGLE SCHOLAR
La source de données: Scopus