Investigations of the adhesion of maleic anhydride/cyclic olefin alternating copolymers to silicon substrates: Improved materials for 193 NM lithography
- Pasquale, A.J.
- Long, T.E.
- Truong, H.
- Allen, R.D.
ISSN: 0021-8464
Argitalpen urtea: 2002
Alea: 78
Zenbakia: 1
Orrialdeak: 1-13
Mota: Artikulua