Investigations of the adhesion of maleic anhydride/cyclic olefin alternating copolymers to silicon substrates: Improved materials for 193 NM lithography
- Pasquale, A.J.
- Long, T.E.
- Truong, H.
- Allen, R.D.
ISSN: 0021-8464
Year of publication: 2002
Volume: 78
Issue: 1
Pages: 1-13
Type: Article