CD SEM calibration to TEM for accurate metrology of FINs in MuGFET devices

  1. Lorusso, G.F.
  2. Collaert, N.
  3. Rooyackers, R.
  4. Ercken, M.
  5. Pollentier, I.
  6. Cheng, S.
  7. Degroote, B.
  8. Jurczak, M.
  9. Biesemans, S.
  10. Richard, O.
  11. Bender, H.
  12. Azordegan, A.
  13. Kuppa, R.
  14. Shirke, S.
  15. Prochazka, J.
  16. Long, T.
Aktak:
IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings

ISSN: 1523-553X

Argitalpen urtea: 2005

Orrialdeak: 169-172

Mota: Biltzar ekarpena

DOI: 10.1109/ISSM.2005.1513326 GOOGLE SCHOLAR
Datuen iturria: Scopus