CD SEM calibration to TEM for accurate metrology of FINs in MuGFET devices

  1. Lorusso, G.F.
  2. Collaert, N.
  3. Rooyackers, R.
  4. Ercken, M.
  5. Pollentier, I.
  6. Cheng, S.
  7. Degroote, B.
  8. Jurczak, M.
  9. Biesemans, S.
  10. Richard, O.
  11. Bender, H.
  12. Azordegan, A.
  13. Kuppa, R.
  14. Shirke, S.
  15. Prochazka, J.
  16. Long, T.
Proceedings:
IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings

ISSN: 1523-553X

Year of publication: 2005

Pages: 169-172

Type: Conference paper

DOI: 10.1109/ISSM.2005.1513326 GOOGLE SCHOLAR
Data source: Scopus