Influence of nitrogen content on the structural, mechanical and electrical properties of TiN thin films

1. Vaz, F.
2. Ferreira, J.
3. Ribeiro, E.
4. Rebouta, L.
5. Lanceros-Méndez, S.
6. Mendes, J.A.
7. Alves, E.
8. Goudeau, Ph.
9. Rivière, J.P.
10. Ribeiro, F.
11. Moutinho, I.
12. Pischow, K.
13. de Rijk, J.