Influence of nitrogen content on the structural, mechanical and electrical properties of TiN thin films
- Vaz, F.
- Ferreira, J.
- Ribeiro, E.
- Rebouta, L.
- Lanceros-Méndez, S.
- Mendes, J.A.
- Alves, E.
- Goudeau, Ph.
- Rivière, J.P.
- Ribeiro, F.
- Moutinho, I.
- Pischow, K.
- de Rijk, J.
ISSN: 0257-8972
Year of publication: 2005
Volume: 191
Issue: 2-3
Pages: 317-323
Type: Article