Structural, mechanical and piezoelectric properties of polycrystalline AlN films sputtered on titanium bottom electrodes
- Pətru, M.
- Isac, L.
- Cunha, L.
- Martins, P.
- Lanceros-Mendez, S.
- Oncioiu, G.
- Cristea, D.
- Munteanu, D.
Journal:
Applied Surface Science
ISSN: 0169-4332
Year of publication: 2015
Volume: 354
Pages: 267-278
Type: Conference paper