Direct patterning of photosensitive chemical solution deposition PZT layers

  1. Marson, S.
  2. Dorey, R.A.
  3. Zhang, Q.
  4. Whatmore, R.W.
  5. Hardy, A.
  6. Mullens, J.
Aldizkaria:
Journal of the European Ceramic Society

ISSN: 0955-2219

Argitalpen urtea: 2004

Alea: 24

Zenbakia: 6

Orrialdeak: 1925-1928

Mota: Artikulua

DOI: 10.1016/S0955-2219(03)00543-0 GOOGLE SCHOLAR