Direct patterning of photosensitive chemical solution deposition PZT layers
- Marson, S.
- Dorey, R.A.
- Zhang, Q.
- Whatmore, R.W.
- Hardy, A.
- Mullens, J.
ISSN: 0955-2219
Year of publication: 2004
Volume: 24
Issue: 6
Pages: 1925-1928
Type: Article
ISSN: 0955-2219
Year of publication: 2004
Volume: 24
Issue: 6
Pages: 1925-1928
Type: Article