Sol-gel fabrication of PZT thick films for MEMS
- Corkovic, S.
- Whatmore, R.W.
- Zhang, Q.
ISSN: 1058-4587, 1607-8489
Year of publication: 2007
Volume: 88
Issue: 1
Pages: 93-102
Type: Conference paper
ISSN: 1058-4587, 1607-8489
Year of publication: 2007
Volume: 88
Issue: 1
Pages: 93-102
Type: Conference paper