Linear optical encoders manufactured by imprint lithography
- Merino, S.
- Retolaza, A.
- Lizuain, I.
ISSN: 0167-9317
Année de publication: 2006
Volumen: 83
Número: 4-9 SPEC. ISS.
Pages: 897-901
Type: Article
Revue:
Microelectronic Engineering
