Linear optical encoders manufactured by imprint lithography

  1. Merino, S.
  2. Retolaza, A.
  3. Lizuain, I.
Journal:
Microelectronic Engineering

ISSN: 0167-9317

Year of publication: 2006

Volume: 83

Issue: 4-9 SPEC. ISS.

Pages: 897-901

Type: Article

DOI: 10.1016/J.MEE.2006.01.018 GOOGLE SCHOLAR

Sustainable development goals

Data source: Scopus