Resistive switching dependence on atomic layer deposition parameters in HfO2-based memory devices

  1. Zazpe, R.
  2. Ungureanu, M.
  3. Golmar, F.
  4. Stoliar, P.
  5. Llopis, R.
  6. Casanova, F.
  7. Pickup, D.F.
  8. Rogero, C.
  9. Hueso, L.E.
Journal:
Journal of Materials Chemistry C

ISSN: 2050-7534 2050-7526

Year of publication: 2014

Volume: 2

Issue: 17

Pages: 3204-3211

Type: Article

DOI: 10.1039/C3TC31819B GOOGLE SCHOLAR