Design of a new FSMA-based actuator for nanopositioning applications
- Asua, E.
- Sadeghzadeh, A.
- Feuchtwanger, J.
- García-Arribas, A.
- Etxebarria, V.
ISSN: 0277-786X
ISBN: 9780819490872
Argitalpen urtea: 2012
Alea: 8409
Mota: Biltzar ekarpena
Aktak:
Proceedings of SPIE - The International Society for Optical Engineering