Design of a new FSMA-based actuator for nanopositioning applications

  1. Asua, E.
  2. Sadeghzadeh, A.
  3. Feuchtwanger, J.
  4. García-Arribas, A.
  5. Etxebarria, V.
Proceedings:
Proceedings of SPIE - The International Society for Optical Engineering

ISSN: 0277-786X

ISBN: 9780819490872

Year of publication: 2012

Volume: 8409

Type: Conference paper

DOI: 10.1117/12.923218 GOOGLE SCHOLAR
Data source: Scopus