Roman
Parkhomenko
Post Doctoral Researcher
University of Groningen
Groninga, HolandaPublications en collaboration avec des chercheurs de University of Groningen (1)
2021
-
Amorphous AlN films grown by ALD from trimethylaluminum and monomethylhydrazine
Dalton Transactions, Vol. 50, Núm. 42, pp. 15062-15070