Roman
Parkhomenko
Post Doctoral Researcher
Universidade do Minho
Braga, PortugalPublications en collaboration avec des chercheurs de Universidade do Minho (1)
2021
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Amorphous AlN films grown by ALD from trimethylaluminum and monomethylhydrazine
Dalton Transactions, Vol. 50, Núm. 42, pp. 15062-15070