Publikationen in Zusammenarbeit mit Forschern von Fraunhofer Institute for Applied Optics and Precision Engineering (3)

2012

  1. High aspect ratio deep UV wire grid polarizer fabricated by double patterning

    Microelectronic Engineering

2011

  1. Atomic layer deposition of iridium thin films and their application in gold electrodeposition

    Proceedings of SPIE - The International Society for Optical Engineering

  2. Iridium wire grid polarizer fabricated using atomic layer deposition

    Nanoscale Research Letters, Vol. 6, pp. 1-4