Atomic Layer Processing (ALP): Ubi es et Quo Vadis?

  1. Ashurbekova, K.
  2. Knez, M.
Journal:
Advanced Materials Interfaces

ISSN: 2196-7350

Year of publication: 2024

Type: Article

DOI: 10.1002/ADMI.202400408 GOOGLE SCHOLAR lock_openOpen access editor