Investigating the lateral motion of SiGe islands by selective chemical etching
- Katsaros, G.
- Rastelli, A.
- Stoffel, M.
- Isella, G.
- Känel, H.v.
- Bittner, A.M.
- Tersoff, J.
- Denker, U.
- Schmidt, O.G.
- Costantini, G.
- Kern, K.
ISSN: 0039-6028
Année de publication: 2006
Volumen: 600
Número: 12
Pages: 2608-2613
Type: Article