Investigating the lateral motion of SiGe islands by selective chemical etching

  1. Katsaros, G.
  2. Rastelli, A.
  3. Stoffel, M.
  4. Isella, G.
  5. Känel, H.v.
  6. Bittner, A.M.
  7. Tersoff, J.
  8. Denker, U.
  9. Schmidt, O.G.
  10. Costantini, G.
  11. Kern, K.
Journal:
Surface Science

ISSN: 0039-6028

Year of publication: 2006

Volume: 600

Issue: 12

Pages: 2608-2613

Type: Article

DOI: 10.1016/J.SUSC.2006.04.027 GOOGLE SCHOLAR

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