Material and doping contrast in semiconductor devices at nanoscale resolution using scattering-type scanning near-field optical microscopy
- Wittborn, J.
- Weiland, R.
- Kazantsev, D.
- Huber, A.
- Hillenbrand, R.
- Keilmann, F.
Actas:
Conference Proceedings from the International Symposium for Testing and Failure Analysis
ISBN: 9780871708441
Año de publicación: 2006
Volumen: 2006
Páginas: 98-101
Tipo: Aportación congreso